EXTREME POSITIONING

AXYT: ACCELERATED XY TABLE

A cost-effective, high-accuracy solution for high-dynamic planar motion applications.

SUB-MICROMETER POSITIONING AT HIGH ACCELERATION

PATENTED PARALLEL-DRIVE TECHNOLOGY
Eliminating the need for accurate linear guides used in traditional stacked stages.
SUB-MICROMETER POSITIONING AT HIGH SPEED
With up to 4g RMS acceleration and minimal system excitation.
LOWER COST, FASTER DEPLOYMENT
Enabled by commercial off-the-shelf components and rapid tailoring to your application.

Precision under miniaturization

As features become smaller, positioning accuracy becomes increasingly critical. Improving substrate accuracy is often impractical or prohibitively expensive, making high-precision motion essential.

Speed versus accuracy

High-throughput production demands fast positioning without compromising sub-micrometer accuracy or introducing system vibrations that affect process quality.

Footprint and moving mass

Traditional stacked-axis stages increase machine footprint and moving mass, limiting throughput and reducing overall system efficiency

The cost of precision

Conventional planar stages rely on custom drive components and highly accurate linear guides, increasing system complexity, cost and supplier dependency.

Solution details

Summary

- Parallel drive topology
The patented X, Y and Rz parallel-drive architecture removes the need for accurate linear guides. Using commercial off-the-shelf sensors and actuators, it delivers sub-micrometer accuracy while significantly reducing system cost.
- Split-axis configuration
A split-axis design minimizes moving mass and machine footprint while enabling high-speed planar motion. The stage corrects X, Y and Rz offsets of the gantry-mounted process module, achieving accelerations up to 40 m/s² with an infinite stroke perpendicular to the gantry.
- Scalable by design
The modular AXYT platform scales with your application. Smaller actuators reduce cost and power dissipation, while larger travel ranges can be achieved without compromising positioning performance, provided the payload remains within specification.

How it works

Patented nForcer platform
A modular motion platform designed for sub-micrometer positioning and rapid customization.
- Parallel X, Y and Rz drive topology
- No accurate linear guides required
- Commercial off-the-shelf components
- Short time to market
Contactless primary stage
The air-bearing-supported primary stage provides frictionless motion and is referenced to an optical 3-DOF metrology frame. High acceleration and a control bandwidth above 200 Hz enable fast, accurate positioning with excellent dynamic performance.
Secondary 'slave' stage
The independently driven secondary stage absorbs disturbance forces from the cable slab while carrying the magnet track for lateral actuation. Its mass also acts as a balance mass, minimizing system excitation during high-speed motion.

Contact sales

Up to 4g RMS acceleration

High-speed planar positioning in X and Y while maintaining sub-micrometer accuracy.

Sub-micrometer accuracy

XY positioning accuracy below 1 µm (3σ) with zero settling time, enabled by high-bandwidth motion control.

Cost-effective architecture

Commercial off-the-shelf sensors and actuators replace expensive custom drive components without sacrificing performance.

Modular platform

Scalable actuator sizes and travel ranges allow the system to be optimized for throughput, payload and cost.

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